Anisotropy of glancing angle deposited films: results of atomistic simulation

Wafer-scale, three-dimensional helical porous thin films deposited at a glancing angle.

Minimization of helices opens a door to impose novel functions derived from the dimensional shrinkage of optical, mechanical and electronic devices. Glancing angle deposition (GLAD) enables one to deposit three-dimensional helical porous thin films (HPTFs) composed of separated spiral micro/nano-columns. GLAD integrates a series of advantageous features, including one-step deposition, wafer-sca...

Structure of glancing incidence deposited TiO(2) thin films as revealed by grazing incidence small-angle X-ray scattering.

For the first time, grazing incidence small-angle X-ray scattering (GISAXS) analysis is used to characterize the morphology of TiO(2) thin films grown by glancing angle physical vapor deposition (GLAD). According to cross-section scanning electron microscopy (SEM) images, the films consist of near isotilted TiO(2) columns of different length and width depending on film thickness. The obtained G...

Glancing Angle Deposition

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Control of Nano-Structure of Photocatalytic TiO2 Films by Oxygen Ion Assisted Glancing Angle Deposition

Enhanced methanol sensing performance of oblique deposited WO3 thin films

Methanol (CH3OH) is a colorless liquid with a mild odor. The wide ranges of applications, toxicity and clinical implications of methanol have made necessary to develop reliable and high-performance methanol sensors. In this paper, WO3 thin films were deposited on SiO2/Si substrates by e-beam evaporation technique under normal and oblique angles and then post-annealed at 500 °C with a flow of ox...